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Coherent
VarioLas
VarioLas

VarioLas

VarioLas UV material processing systems, based on the COMPexPro 100 Excimer laser series are affordable tools for high-quality UV microprocessing. Superior optics design, rugged mechanics, and unmatched pulse-to-pulse stability are the key ingredients to each of the VarioLas systems, which are available at 193 nm, 248 nm, and 308 nm.

VarioLas Key Features & Benefits
High-resolution optics and mechanics ensure reproducible results
Modular design with tailored options for flexible use
Square beam and line beam fields for optimum results
Compatible with all COMPex laser models to enable efficient processing

Applications

Application
Process
Material

Laser Lift-Off
Dopant Activation
Heat Treating
Semiconductor

Features & Benefits


VarioLas Model
VarioLas Eco
VarioLas Pro
VarioLas Sweep
Field Geometry
Square
Square
Line
Substrate Field Size (mm2)
2 x 2
2 x 2
50 x 0.6
Optical Resolution (μm)
30
5
-
Working Distance (mm)
50
50
150
Max. Repetition Rate (Hz)
100
100
100
Max. Energy Density (mJ/cm2) at 193 nm
1000
1000
230
Max. Energy Density (mJ/cm2) at 248 nm
3500
3500
600
Max. Energy Density (mJ/cm2) at 308 nm
3000
3000
500
Energy Stability (%, 1 sigma) at 193 nm
2
2
2
Energy Stability (%, 1 sigma) at 248 nm
1
1
1
Energy Stability (%, 1 sigma) at 308 nm
1
1
1

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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